DUBLIN--(BUSINESS WIRE)--Research and Markets (http://www.researchandmarkets.com/research/8f9137/sputtering_materia) has announced the addition of Elsevier Science and Technology's new report "Sputtering Materials for VLSI and Thin Film Devices" to their offering.
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed.
The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting.
- Provides practical case studies and troubleshooting examples
- Unique coverage of the design of sputtering targets and processing of sputtering materials for thin film applications
- Essential design information for engineers working in the field of flat panel displays
Key Topics Covered:
- Chapter 1: Microelectronic industry and sputtering materials
- Chapter 2: Sputter deposition and thin films
- Chapter 3: Sputtering targets and performance
- Chapter 4: Sputtering target manufacturing
- Chapter 5: Sputtering materials for integrated circuits
- Chapter 6: Sputtering materials for flat panel displays and photovoltaic devices
- Chapter 7: Ferromagnetic targets for salicide processes and data storage applications
- Chapter 8: Trouble shooting in sputtering
- Appendix I Diffusion and phase transformation
- Appendix II Crystallographic texture
- Appendix III Mechanical property evaluation
- Appendix IV Units and conversion factors
- Appendix V Periodic table
For more information visit http://www.researchandmarkets.com/research/8f9137/sputtering_materia