Inpria Announces New Funding from Air Liquide, Samsung, Intel Capital and TOK, and Broadens Industry Support

Financing to be used to complete EUV photoresist development and commence scale-up manufacturing

CORVALLIS, Ore.--()--Inpria Corporation, a pioneer in high-resolution photoresists, announced today the successful closing of its most recent financing, thereby doubling the company’s total financing to date. This round was led by new investor Air Liquide Venture Capital (ALIAD) with significant participation from existing investors Samsung Venture Investment Corporation and Intel Capital. New investor Tokyo Ohka Kogyo (TOK) also joined the round.

Inpria will use the proceeds to complete product development and to scale-up manufacturing for its metal oxide photoresists. With a focus on extreme ultraviolet (EUV) lithography, Inpria photoresists offer semiconductor manufacturers a purpose-built solution for semiconductor patterning at 7nm and beyond. Inpria’s products are designed not only to support critical imaging requirements but also to uniquely simplify the pattern transfer process.

“We are thrilled to have ALIAD and TOK join as our newest investors,” said Andrew Grenville, CEO of Inpria Corporation. “Their participation, along with continued support from both Samsung and Intel Capital, reflects Inpria’s progress and the industry’s increasing interest in novel patterning solutions.”

“We are delighted to take a minority stake in Inpria, an innovative technology start-up developing a new platform of inorganic patterning materials for the semiconductor industry,” said Pierre-Etienne Franc, VP Advanced Business & Technologies of Air Liquide and CEO of ALIAD.

The financing highlights expanding industry support for novel EUV resist development to improve imaging capability. “With semiconductor materials, development relationships and industry support are critical components of a successful product development process,” commented Wendell Brooks, president of Intel Capital. “Over the past two years, Inpria has demonstrated capability in both materials technology development and commercialization.”

Grenville concluded by saying, “Last year we dramatically improved the sensitivity of our photoresists and worked diligently with our partners to address key integration and performance needs. Looking ahead, we believe 2016 will be a pivotal year for our products.”

About Inpria

Inpria Corporation is a pioneer in extending semiconductor manufacturing with inorganic thin-films for nanoscale patterning. Inpria’s metal oxide photoresists for EUV lithography enable advanced performance with simplified processing. (

About Air Liquide Venture Capital (ALIAD)

About Intel Capital or follow @Intelcapital

About Samsung Ventures Investment Corporation

About Tokyo Ohka Kogyo Co., Ltd. (TOK)


Inpria Corporation
Ann Carney Nelson, 541-844-2812

Release Summary

Inpria Corporation, a pioneer in high-resolution photoresists for semiconductor patterning, announces new funding from Air Liquide, Samsung, Intel, and TOK.


Inpria Corporation
Ann Carney Nelson, 541-844-2812