SAN DIEGO--(BUSINESS WIRE)--Cymer, Inc. (Nasdaq:CYMI), the world's leading supplier of excimer laser light sources used in semiconductor manufacturing, announced the company reached its goal of demonstrating 100 watts of extreme ultraviolet (EUV) burst power at the 2007 International EUVL Symposium held recently in Sapporo, Japan. The accomplishment further reinforces Cymer’s commitment and leadership in the commercialization of EUV technology and at Cymer’s Asia Pacific Lithography Symposiums, Cymer will present more material on this most recent achievement.
“Our EUV research and development – which spans nearly a decade – continues its steady climb with this announcement,” said Bob Akins, chief executive officer of Cymer. “This demonstration of 100 watts burst power is a reflection of our passion and dedication to leading the industry and in making EUV a capable and economically viable lithography technology.”
Cymer has reached all of its EUV power performance milestones using a laser produced plasma (LPP) system consisting of multi-staged carbon dioxide (CO2) laser and tin (Sn) droplet target, which has been in operation since June 2006. In the first quarter of 2007, Cymer also disclosed a breakthrough in debris mitigation technology that will substantially extend the lifetime of the multi-layer-mirror (MLM) collector, which will enable an economically viable cost of operation, a key component of the source system. These rapid advancements in technology validate the LPP architecture’s ability to scale to high volume manufacturing (HVM) performance requirements.
Forward Looking Statements
Statements in this press release that are not strictly historical in nature are forward-looking statements. These statements include, but are not limited to statements regarding extending the lifetime of the MLM collector, enabling an economically viable cost of operation, and scaling to HVM performance requirements. These statements are predictions based on current information and expectations and involve a number of risks and uncertainties. Actual events or results may differ materially from those projected in any of such statements due to various factors, including but not limited to: EUV source actual performance not meeting expectations, system cost of operation being significantly higher than anticipated, the source not scaling appropriately to HVM performance requirements, delays or cancellations by customers of their orders, the performance and market acceptance of the company’s new products or technologies; new and enhanced product offerings by competitors; the company’s ability to meet its production and product development schedules; the demand for semiconductors in general, and, in particular, for leading-edge devices with smaller geometries; the timing of customer orders, shipments and acceptances; cyclicality in the market for semiconductor manufacturing equipment; and the rate at which semiconductor manufacturers adopt new technologies and purchase and take delivery of photolithography tools from the company’s customers. For a discussion of these and other factors which may cause our actual events or results to differ from those projected, please refer to the company’s most recent annual report on Form 10-K and quarterly reports on Form 10-Q, as well as other subsequent filings with the Securities and Exchange Commission. You are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date of this press release. All forward-looking statements are qualified in their entirety by this cautionary statement, and the company undertakes no obligation to revise or update any forward-looking statements to reflect events or circumstances after the date of this press release.
Cymer, Inc. is the world's leading supplier of deep ultraviolet (DUV) laser illumination sources, the essential light source for DUV photolithography systems. DUV lithography is a key enabling technology, which has allowed the semiconductor industry to meet the exacting specifications and manufacturing requirements for volume production of today's advanced semiconductor chips. Further information on Cymer may be obtained from the Company's SEC filings, the Internet at www.cymer.com or by contacting the company directly.