Aviza Technology Receives Order for
Celsior(TM) Single Wafer ALD System From Leading DRAM Manufacturer
System to be Installed at U.S.-based Facility for 90-nm DRAM Manufacturing
SCOTTS VALLEY, Calif.--(BUSINESS WIRE)--Aviza Technology, Inc. (NASDAQ:AVZA), a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets, today announced that it has received an order for its next-generation single wafer atomic layer deposition (ALD) system, Celsior™, from one of the world’s leading DRAM manufacturers. The system is scheduled for installation at the DRAM maker’s U.S.-based facility and will be utilized for fabricating 90-nm DRAM devices on 200-mm wafers.
“We are very excited that Celsior continues to gain increased adoption among leading chipmakers worldwide”
This announcement marks the latest milestone in a series of consecutive orders for Aviza’s Celsior single wafer ALD system for high volume manufacturing in Europe, China, Taiwan and now the United States. Previous Celsior systems shipped for production-scale manufacturing have been 300-mm systems. Due to Celsior’s flexible platform and advanced systems capabilities, the current ALD system will be used for 200-mm/300-mm bridge application thus offering the flexibility and extendibility that is key to meeting customers’ multiple generation production needs.
“We are very excited that Celsior continues to gain increased adoption among leading chipmakers worldwide,” said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. “The recent order from the major DRAM company in the U.S. complements Aviza’s presence at multiple sites worldwide quite well, and is a testament to Celsior’s proven process capabilities for meeting the rigorous technology and productivity requirements needed to manufacture tomorrow’s advanced IC devices at the 90-nm and below technology nodes.”
The award winning Celsior system features an innovative chamber, which offers increased throughput, lower chemical consumption and extended process window—resulting in lower cost of ownership. Celsior’s patented showerhead is designed to meet the stringent ALD process needs, with the capability of achieving less than 1 percent thickness uniformity requirements across a 300-mm wafer. The tool leverages a small reaction chamber utilizing Aviza’s patent pending computer modeled gas flow dynamics to reduce the reaction volume and remove empty spaces, reducing the areas available for defect formation resulting in higher die yields. Celsior is based on a reliable, field proven platform acquired from Trikon Technologies, which merged with Aviza Technology in December 2005. This platform includes a robust transfer hub and high-efficiency control system—translating into higher system uptime and availability. Celsior is extendible, allowing the seamless addition of process chambers for adding future capacity or new technology.
Note to Editors: Aviza will be exhibiting at this year's SEMICON Japan tradeshow, to be held from Wednesday, December 6 to Friday, December 8, 2006. For more information about Aviza and its products, please visit the company in the Hall 2, Booth #2B-201 of the Makuhari Messe in Chiba, Japan.
This press release contains forward-looking statements. These forward-looking statements are based on our management's current expectations and beliefs and involve numerous risks and uncertainties that could cause actual results to differ materially from expectations. You should not rely upon these forward-looking statements as predictions of future events because we cannot assure you that the events or circumstances reflected in these statements will be achieved or will occur. These forward-looking statements include, but are not limited to, the statements made by Subrata Chatterji and all statements containing the words "believes," "expects," "may," "will," "should," "seeks," "intends," "plans," "estimates" or "anticipates" or the negative of these words and phrases or other variations of these words and phrases or comparable terminology. Many factors could cause our actual results to differ materially from those projected in these forward-looking statements. Some of these factors and other important factors are detailed in our various Securities and Exchange Commission filings, particularly in our most recent Annual Report on Form 10-K and Quarterly Report on Form 10-Q, copies of which are available from us without charge. Please review these filings and do not place undue reliance on these forward-looking statements. We assume no obligation to update forward-looking statements.
About Aviza Technology, Inc.
Aviza Technology, Inc. is a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets. Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD). The company is publicly traded on the NASDAQ Global Market (NASDAQ GM: AVZA). Aviza is headquartered in Scotts Valley, Calif., with manufacturing, R&D, sales and customer support facilities located in the UK, Germany, France, Italy, Taiwan, China, Japan, Korea, Singapore and Malaysia. Additional information about the company can be found at http://www.avizatechnology.com.
Celsior is a trademark of Aviza Technology, Inc.