Aviza Technology Ships Celsior(TM) ALD Tool to Leading European DRAM Manufacturer; Next-Generation Single Wafer ALD System Seeing Continued Global Adoption
This latest milestone marks a series of consecutive shipments for Aviza's Celsior single wafer ALD system to multiple high volume, global manufacturing sites, including Taiwan, China and Europe.
“We believe Celsior offers the cost of ownership advantages and demonstrates the proven productivity that our customers seek.”
"Aviza's Celsior ALD system offers the critical hardware and process capabilities demanded by this very precise deposition technology to satisfy chipmakers' stringent production requirements for 90-nm and below geometries," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "We believe Celsior offers the cost of ownership advantages and demonstrates the proven productivity that our customers seek."
Celsior features an innovative chamber, which offers increased throughput, lower chemical consumption and extended process window -- resulting in lower CoO. Celsior's patented showerhead is designed to meet the stringent ALD process needs, including less than 1 percent thickness uniformity requirements across a 300-mm wafer. The tool leverages a small reaction chamber utilizing Aviza's patent pending computer modeled gas flow dynamics to reduce the reaction volume and remove empty spaces, reducing the areas available for defect formation resulting in higher die yields. Celsior is based on a reliable, field proven central transfer hub acquired from Trikon Technologies, who merged with Aviza Technology in December 2005. This transfer hub includes a robust control system -- translating into higher system uptime and availability. Celsior is extendible, allowing the seamless addition of process chambers for adding future capacity or new technology.
This press release contains forward-looking statements. These forward-looking statements are based on our management's current expectations and beliefs and involve numerous risks and uncertainties that could cause actual results to differ materially from expectations. You should not rely upon these forward-looking statements as predictions of future events because we cannot assure you that the events or circumstances reflected in these statements will be achieved or will occur. These forward-looking statements include, but are not limited to, the statements made by Subrata Chatterji and all statements containing the words "believes," "expects," "may," "will," "should," "seeks," "intends," "plans," "estimates" or "anticipates" or the negative of these words and phrases or other variations of these words and phrases or comparable terminology. Many factors could cause our actual results to differ materially from those projected in these forward-looking statements. Some of these factors and other important factors are detailed in our various Securities and Exchange Commission filings, particularly in our most recent Annual Report on Form 10-K and Quarterly Report on Form 10-Q, copies of which are available from us without charge. Please review these filings and do not place undue reliance on these forward-looking statements. We assume no obligation to update forward-looking statements.
About Aviza Technology, Inc.
Aviza Technology, Inc. is a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets. Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD). The company is publicly traded on the NASDAQ National Market (NASDAQ:AVZA). Aviza is headquartered in Scotts Valley, Calif., with manufacturing, R&D, sales and customer support facilities located in the UK, Germany, France, Italy, Taiwan, China, Japan, Korea, Singapore and Malaysia. Additional information about the company can be found at http://www.avizatechnology.com.
Celsior is a trademark of Aviza Technology, Inc.