Aviza Technology Ships Next-Generation Single Wafer ALD System to Inotera Memories of Taiwan; Foundry Aims to Use Tool for 90-nm DRAM Production
This shipment marks the successful culmination of a technology development and evaluation partnership between Aviza and a leading DRAM customer to optimize ALD system and process technologies for stringent high volume manufacturing requirements.
“This order represents another key milestone for Aviza's ALD program and validates the increasing demand for this advanced technology into today's production environment”
"This order represents another key milestone for Aviza's ALD program and validates the increasing demand for this advanced technology into today's production environment," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "We believe Celsior's advanced features better control the process and enable low cost of ownership (CoO) for high volume manufacturing to meet the inherent challenges of the ALD technique. Inotera has been a long time customer of Aviza. As our mutually rewarding partnership continues to grow, we look forward to supporting Inotera's future manufacturing needs."
Technology & Process Solutions for the Single Wafer ALD Market
A key feature of Celsior is its production-proven platform, which was acquired through a joint development partnership (JDP) with Trikon Technologies prior to the Aviza/Trikon merger transaction. The same software platform has been used in chemical vapor deposition (CVD), physical vapor deposition (PVD) and etch systems in production environments by fabs around the world. The JDP enabled Aviza to focus on the development of a process chamber that addresses the inherent challenges of ALD.
Celsior also features an innovative chamber, which offers increased throughput, lower chemical consumption and extended process window -- resulting in lower CoO. Celsior's patented showerhead is designed to meet the stringent ALD process needs, including less than 1 percent thickness uniformity requirements across a 300-mm wafer. The system is based on a reliable, field proven central transfer hub, which includes robust control system -- translating into higher system uptime and availability. Celsior is extendible, allowing the seamless addition of process chambers for adding future capacity or new technology.
ALD is projected to be among the fastest growing segments in the semiconductor industry, with a CAGR of 22.8 percent between 2006-2011, according to VLSI Research Inc.
Celsior is a complementary addition to the company's ALD product portfolio. With its variable batch ALD tool, the Verano(TM) 5500, Aviza is well positioned to offer the technology and application-specific process solutions to support its customers' single wafer and/or variable batch ALD manufacturing needs.
This press release contains forward-looking statements. These forward-looking statements are based on our management's current expectations and beliefs and involve numerous risks and uncertainties that could cause actual results to differ materially from expectations. You should not rely upon these forward-looking statements as predictions of future events because we cannot assure you that the events or circumstances reflected in these statements will be achieved or will occur. These forward-looking statements include, but are not limited to, the statements made by Subrata Chatterji and all statements containing the words "believes," "expects," "may," "will," "should," "seeks," "intends," "plans," "estimates" or "anticipates" or the negative of these words and phrases or other variations of these words and phrases or comparable terminology. Many factors could cause our actual results to differ materially from those projected in these forward-looking statements. Some of these factors and other important factors are detailed in our various Securities and Exchange Commission filings, particularly in our most recent Annual Report on Form 10-K and Quarterly Report on Form 10-Q, copies of which are available from us without charge. Please review these filings and do not place undue reliance on these forward-looking statements. We assume no obligation to update forward-looking statements.
Inotera Memories, Inc. was incorporated on January 23rd, 2003. Inotera was founded as a joint venture by Infineon Technologies AG and Nanya Technology Corporation. Inotera's production facility has been designed to manufacture high-density and high-performance commodity DRAM (Dynamic Random Access Memory) products using state of the art trench technology. The collaboration of Infineon's world leading technology and Nanya's cost efficiency in mass production have developed an innovative facility which are highly productive, highly competitive and leading edge in the DRAM industry. For more information please visit: http://www.inotera.com
About Aviza Technology, Inc.
Aviza Technology, Inc. is a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets. Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD). The company is publicly traded on the NASDAQ National Market (NASDAQ:AVZA). Aviza is headquartered in Scotts Valley, Calif., with manufacturing, R&D, sales and customer support facilities located in the UK, Germany, France, Italy, Taiwan, China, Japan, Korea, Singapore and Malaysia. Additional information about the company can be found at http://www.avizatechnology.com.
Celsior and Verano 5500 are trademarks of Aviza Technology, Inc.