Aviza Technology Announces Multiple System Order From SMIC; Systems Targeted for 90-nm DRAM Production at China's Sole 300 mm Facility in Beijing
"This multiple system order marks a milestone for Aviza, placing the first RVP-300plus systems in China's only 300-mm fab located at SMIC's Beijing Fab 4," said May Su, Vice President and General Manager, Thermal Business Unit of Aviza Technology, Inc. "The RVP-550 next-generation minibatch tools are repeat orders that came as a result of a successful system evaluation. We are pleased that SMIC has selected our production-proven thermal processing systems and look forward to supporting SMIC's Fab 4."
“This multiple system order marks a milestone for Aviza, placing the first RVP-300plus systems in China's only 300-mm fab located at SMIC's Beijing Fab 4”
The RVP-300plus is a production-proven 300-mm furnace known for best on-wafer results, combining superior productivity with a full complement of atmospheric and LPCVD process solutions. This is accomplished by employing features such as fast temperature ramp-up and ramp-down capability, which results in uniform chemical deposition and temperature control across the wafer. The RVP-300plus utilizes a dual-boat configuration resulting in increased throughput.
The RVP-550 vertical thermal processor for 300-mm batch wafer processing is designed for process capability and production requirements through the 65-nm node and beyond. The tool offers enhanced throughput as a result of its dual-boat platform. In addition, variable load sizes, fast temperature ramping and Aviza's Cross-Flow technology make the RVP-550 a cost-effective choice for a multitude of advanced furnace processes. Key applications for RVP-550 include: low particle DCS Nitride, Satin and BTBAS low temperature nitride for cap and spacer, crystal-orientation independent Radical Oxidation and Selective Oxidation.
Note to editors: Aviza will be exhibiting at this year's SEMICON China exhibition, to be held from Tuesday, March 21, 2006, to Thursday, March 23, 2006. For more information about Aviza and its products, please visit the company in Hall W3, Booth 3581 of the Shanghai New International Expo Center in Shanghai, China.
Safe Harbor Statement
This press release contains forward-looking statements. These forward-looking statements are based on our management's current expectations and beliefs and involve numerous risks and uncertainties that could cause actual results to differ materially from expectations. You should not rely upon these forward-looking statements as predictions of future events because we cannot assure you that the events or circumstances reflected in these statements will be achieved or will occur. These forward-looking statements include, but are not limited to, the statements made by May Su and all statements containing the words "believes," "expects," "may," "will," "should," "seeks," "intends," "plans," "estimates" or "anticipates" or the negative of these words and phrases or other variations of these words and phrases or comparable terminology. Many factors could cause our actual results to differ materially from those projected in these forward-looking statements. Some of these factors and other important factors are detailed in our various Securities and Exchange Commission filings, particularly in our most recent Annual Report on Form 10-K and Quarterly Report on Form 10-Q, copies of which are available from us without charge. Please review these filings and do not place undue reliance on these forward-looking statements. We assume no obligation to update forward-looking statements.
About Aviza Technology, Inc.
Aviza Technology, Inc. is a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets. Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD). The company is publicly traded on the NASDAQ National Market (Nasdaq:AVZA). Aviza is headquartered in Scotts Valley, Calif., with manufacturing, R&D, sales and customer support facilities located in the UK, Germany, France, Italy, Taiwan, China, Japan, Korea, Singapore and Malaysia. Additional information about the company can be found at http://www.avizatechnology.com.
RVP-300plus and RVP-550 are trademarks of Aviza Technology, Inc.