Tegal Receives Advanced Etch Tool Order for RRAM Development
The development program is aimed at producing non-volatile, high-density memory cells separately from logic devices for system-on-chip applications. RRAM development is a focus for several device manufacturers because of its ideal attributes for high density, low cost and low power consumption.
“Tegal is the leading company in plasma etch technology for several types of non-volatile memory devices, such as FeRAM, MRAM, RRAM and polymeric memories”
"Tegal is the leading company in plasma etch technology for several types of non-volatile memory devices, such as FeRAM, MRAM, RRAM and polymeric memories," said Murali Narasimhan, Tegal's recently appointed Vice President of Marketing. "We announced an order earlier this year for an Endeavor PVD system which was delivered to another company pursuing RRAM development. Tegal is uniquely positioned to provide both etch and deposition solutions in this emerging market."
The Tegal 6540 used in this application features the unique dual-frequency Hre- etch process module upgraded with a high temperature ESC capable of processing at wafer temperatures as high as 500C. This extended temperature range enhances the removal of hard-to-etch metals and metal oxide films without re-deposition on the surface of the device.
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Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.
More information is available on the Internet at: www.tegal.com.