Applied Materials Delivers Advanced Copper Technology for FPD
Manufacturing on AKT-PiVot PVD System
YOKOHAMA, Japan--(BUSINESS WIRE)--Applied Materials, Inc. today announced that it has expanded its
breakthrough AKT- PiVot™ 55KV PVD* system to include
advanced copper deposition processing for manufacturing TFT-LCD* flat
panel displays (FPD). Using the PiVot system, FPD manufacturers can
transition from aluminum to copper bus lines to achieve faster pixel
response and lower power consumption in next-generation LCD-TV panels.
The PiVot system delivers benchmark, cost-efficient copper deposition
performance by combining high deposition rates, efficient target
utilization and long maintenance intervals with enhanced film morphology.
“The system’s proven
productivity and proprietary copper process technology create a powerful
addition to our strong portfolio of FPD solutions.”
Key to the PiVot system’s superior film quality is its proprietary
rotary cathode design that employs unique deposition modulation
technology to deposit copper layers with uniform grain distribution, low
resistivity and high thickness uniformity. The PiVot system also enables
greater than 80% target utilization to provide significant savings in
expensive target material.
“By providing unmatched film properties and efficient raw material
utilization, our AKT-PiVot system answers the critical needs of today’s
LCD TV market that is driven by demand for larger and ultra-high
definition panels and requires innovations in deposition technology to
deliver high-quality films at a low cost-of-ownership,” said Dr. Mark
Pinto, senior vice president and general manager of Applied’s Display,
and Energy and Environmental Solutions groups. “The system’s proven
productivity and proprietary copper process technology create a powerful
addition to our strong portfolio of FPD solutions.”
The PiVot system’s modular architecture enables a large variety of
configurations to maximize production efficiency, eliminating the
bottlenecks caused by different process times in different modules in a
traditional in-line machine. The PiVot system’s cluster-like arrangement
also allows continuous operation during individual module maintenance.
Combined with long maintenance intervals and extended target life, PiVot
system provides the highest availability and longest continuous
production time in the industry.
The AKT-PiVot 55KV PVD system’s superior copper deposition technology
will be showcased at Applied Materials’ booth at FPD International and
Green Device 2009 in Yokohama, Japan, on October 28-30 as part of
Applied’s portfolio of advanced FPD manufacturing solutions. These
solutions include PECVD*, PVD for TFT-array and color filter, electron
beam array test technologies, factory automation and service. In
addition, Applied Materials will display its green device manufacturing
technologies, including solar, low-e glass coating and roll-to-roll
deposition for flexible PV* and display.
Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in
Nanomanufacturing Technology™ solutions with a broad portfolio of
innovative equipment, service and software products for the fabrication
of semiconductor chips, flat panel displays, solar photovoltaic cells,
flexible electronics and energy
efficient glass. At Applied Materials, we apply Nanomanufacturing
Technology to improve the way people live. Learn more at www.appliedmaterials.com.
* TFT-LCD = thin film transistor liquid crystal display; PVD =
physical vapor deposition; PECVD = plasma-enhanced chemical vapor
deposition; PV = photovoltaic
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