Applied Materials Launches Breakthrough PVD System for Gen 8.5 Flat
Panel Display Manufacturing
TOKYO--(BUSINESS WIRE)--Applied Materials, Inc. today expanded its solutions for TFT-LCD(1) flat
panel display (FPD) manufacturing, with the launch of its breakthrough
AKT-PiVot™ 55KV
PVD(1) system for depositing metal and TCO(1) materials on Gen 8.5 (5.5m2)
glass substrates. The new system combines key innovations with Applied’s
field-proven components to provide customers with a unique,
high-reliability PVD tool specifically designed to increase the
productivity and reduce the cost of manufacturing large-sized LCD TV
panels.
The AKT-PiVot system’s module architecture
delivers significantly faster cycle time and nearly 3x higher target
utilization than any competitive system, and enables a large variety of
configurations to maximize production efficiency. Unlike traditional
in-line systems, the AKT-PiVot’s parallel
processing capability eliminates bottlenecks caused by different process
times for each film layer. The system’s
cluster-like arrangement also allows continuous operation during
individual module maintenance.
“The growth of the large-size LCD TV market
depends on continuous cost reductions in panel manufacturing, especially
in the cost of materials and equipment cost-of-ownership,”
said In Doo Kang, general manager of Applied’s
Display Business Group. “Our AKT-PiVot system
answers this critical need, providing an unmatched, low
cost-of-ownership solution to large-area PVD manufacturing. The system’s
novel design integrates proven components, including the company’s
proprietary rotary target technology, to create a unique,
high-throughput, low-risk PVD system. The PiVot system is a powerful
addition to our strong portfolio of FPD systems, covering PECVD(1), PVD
for the color filter ITO(1) layer, and electron beam array test
technologies, designed to help customers achieve high-productivity,
cost-effective manufacturing.”
Each deposition module of the PiVot system features an array of
large-volume, rotary targets that have >4x
longer lifetime than conventional planar targets. The PiVot system’s
deposition modules feature an innovative pre-sputter unit that enables
target conditioning using only one substrate, rather than up to 50
substrates that are needed with other systems to achieve the same
results. For more information, visit: www.appliedmaterials.com/products/akt_pivot_1.html.
The AKT-PiVot 55KV PVD system will be showcased at Applied’s
booth at FPD International 2007 in Yokohama, Japan, on October 24-26,
2007, as part of Applied’s portfolio of
advanced flat panel manufacturing solutions.
Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in
Nanomanufacturing Technology™ solutions with
a broad portfolio of innovative equipment, service and software products
for the fabrication of semiconductor chips, flat panel displays, solar
photovoltaic cells, flexible electronics and energy efficient glass. At
Applied Materials, we apply Nanomanufacturing Technology to improve the
way people live. Learn more at www.appliedmaterials.com.
(1) TFT-LCD = thin film transistor liquid crystal display; PVD =
physical vapor deposition; TCO = transparent conductive oxide; PECVD =
plasma-enhanced chemical vapor deposition; ITO = indium tin oxide
