Applied Materials Delivers Critical 45nm Photomask Etch Technology with
New Tetra III System
SANTA CLARA, Calif.--(BUSINESS WIRE)--Applied Materials, Inc. today launched its new Applied Centura®
TetraTM III Advanced Reticle
Etch, the only system that delivers the vital nanomanufacturing
technology required for etching 45nm photomasks. The Tetra III controls
trench depths across quartz masks to <10Å
and reduces critical dimension (CD) loss to <10nm—enabling
the use of alternating phase shift mask (PSM) and aggressive optical
proximity correction techniques in customers’
most critical device layers. The system offers virtually-zero defect,
high productivity etch processes for chrome, quartz, molybdenum silicon
oxynitride (MoSiON) and various new materials for next generation
lithography applications.
“More than ever before,
applications are proliferating as the industry explores several
potential solutions for next generation lithography. With its capability
to etch the entire spectrum of photomask materials, the Tetra III system
is well-positioned for all applications.”
"The Tetra III system’s outstanding
performance in advanced binary mask and PSM applications will be key to
enabling customers’ 45nm-generation and beyond
mask production," said Tom St. Dennis, senior vice president and general
manager of Applied Materials' Etch, Cleans, Front End and Implant
Products Groups. “More than ever before,
applications are proliferating as the industry explores several
potential solutions for next generation lithography. With its capability
to etch the entire spectrum of photomask materials, the Tetra III system
is well-positioned for all applications.”
The Applied Centura Tetra III system’s
ultra-clean and extendible platform enables customers to etch the most
advanced masks with the highest yields to date. To learn more about this
system, visit www.appliedmaterials.com/products/photomask_etch_4.html.
Applied Materials, Inc. (Nasdaq: AMAT) is the global leader in
Nanomanufacturing Technology™ solutions with a
broad portfolio of innovative equipment, service and software products
for the fabrication of semiconductor chips, flat panels, solar
photovoltaic cells, flexible electronics and energy efficient glass. At
Applied Materials, we apply Nanomanufacturing Technology to improve the
way people live. Learn more at www.appliedmaterials.com.
