Applied Materials Releases the Industry's Most Productive CVD Processing
Platform — the Applied Producer GT
SANTA CLARA, Calif.--(BUSINESS WIRE)--Applied Materials, Inc. today raised productivity to a new level with
the launch of its Applied Producer® GT™,
the industry’s fastest, most cost-effective CVD1
platform. Capable of processing 150 wafers per hour (wph), the Producer
GT doubles the throughput of any competitive system, and enables a 30%
reduction in cost of ownership and a 50% increase in wph/m2
footprint. The Producer GT supports the full portfolio of Applied’s
PECVD1 technology applications with more than
30 world-class production-proven processes.
“This is a dream machine for our customers –
lightning-speed processing with low cost of ownership and proven process
results”
“This is a dream machine for our customers –
lightning-speed processing with low cost of ownership and proven process
results,” said Dr. Farhad Moghadam, senior
vice president and general manager of Applied Materials’
Thin Films Group. “As films become thinner in
leading-edge devices, deposition tools must become faster and much more
efficient to maximize fab utilization. The Producer GT builds on our
incredibly successful Producer system to provide customers with process
transparency for a full range of PECVD applications for 45nm and beyond
on a faster platform. We are very excited by customers’
response to the GT and are seeing strong product momentum.”
Key to the Applied Producer
GT platform’s benchmark performance is
its FX robot that allows the simultaneous transfer of four wafers,
enabling maximum productivity of a three-Twin Chamber®
Producer configuration. The platform’s
double-decker loadlock reduces wafer handling time and increases chamber
utilization. Wafer-handling components, designed to minimize defects,
achieve 30% lower mechanical-based particle performance while
maintaining high productivity. A high-capacity factory interface
supports up to four FOUPs for operational efficiency and integrated
metrology capability. The Producer GT has also been redesigned to
significantly improve serviceability, reducing preventive maintenance
time by up-to 25%.
To further reduce operating costs by up to 40%, the company’s
Metron division offers a customized energy-saving pump and abatement
system package. The Marathon™ 8600 is the
only abatement system available that can support the Producer GT’s
three chamber design with a single unit.
Customers have purchased and are using more than 1,500 Producer CVD
systems worldwide. The Producer is used by every chip manufacturer in
the industry for fabricating all types of devices through the most
advanced 45nm technology node. The Producer has established Applied’s
technology leadership in all advanced chipmaking applications, including
low k, strain engineering, litho-enabling films, thermal films and
high-temperature PECVD.
Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in
Nanomanufacturing Technology™ solutions with
a broad portfolio of innovative equipment, service and software products
for the fabrication of semiconductor chips, flat panels, solar
photovoltaic cells, flexible electronics and energy efficient glass. At
Applied Materials, we apply Nanomanufacturing Technology to improve the
way people live. Learn more at www.appliedmaterials.com.
1 CVD=chemical vapor deposition;
PECVD=plasma enhanced CVD