Metron Launches Innovative Point-of-Use Copper Abatement System
SAN JOSE, Calif.--(
BUSINESS WIRE)--July 6, 2006--Metron Technology, Inc. today announced its innovative Aquareus(TM) system, the semiconductor industry's first and only point-of-use (POU) solution for abating copper from a CMP(1) system's effluent stream. As part of Metron's strategy to provide world-class environmental solutions, the Aquareus system's simplified treatment process enables chipmakers to meet the most stringent liquid discharge limits at a lower cost and with less risk than complex back-pad methods. Providing greater than 99% removal efficiency and over 3000 hours MTBF(1), the Aquareus can save users up to $0.15 per wafer, or up to 30% in treatment cost over centralized back-pad systems, allowing a rapid return on investment.
"The Aquareus system showcases the kind of environmental innovation that results from combining Applied Materials' strong CMP process technology with Metron's abatement expertise to provide an industry solution that reliably manages copper disposal at much lower cost than current abatement options," said Werner Finsterbusch, general manager of Metron Technology. "With Aquareus, Metron expands its broad portfolio of abatement systems that provide customers with technically advanced, cost-effective solutions to meet their most stringent environmental and production requirements."
The Aquareus system utilizes a highly selective, proprietary, fluidized bed ion exchange resin technology that handles high flows from a broad range of CMP chemical slurries, with minimal service or maintenance. Two years of intense testing treating copper CMP slurry in Applied Materials' Maydan Technology Center in Sunnyvale, California, has demonstrated exceptional reliability and efficiency. This real-world experience has proven Aquareus' ability to cost-effectively reduce emissions from multiple copper CMP systems to levels far below the toughest governmental standards.
A typical CMP tool running in production generates effluent containing approximately one hundred kilograms of copper per year. Aquareus concentrates copper by a factor of 200:1 for greater efficiency and cost-effectiveness than back-pad copper abatement methods. The Aquareus system's point-of-use design allows process flexibility and incremental growth capability as semiconductor fab operations expand. Jointly developed by Applied Materials, Inc. and BOC Edwards, the Aquareus system is exclusively sold and serviced worldwide by Metron Technology.
Metron Technology, Inc. is a supplier of fab-wide support services to the semiconductor and related industries providing custom integrated solutions for optimizing operations and improving manufacturing efficiency. Metron is headquartered in San Jose, California, and is a wholly-owned subsidiary of Applied Materials, Inc. (Nasdaq:AMAT). Metron can be found on the web at www.metrontech.com.
(1) CMP = chemical mechanical planarization; MTBF = mean time between failure
