TOKYO--(BUSINESS WIRE)--Toray Engineering Co., Ltd. has announced an "ultrasonic proximity-drying coating system" for use in the manufacturing process of liquid crystal displays (LCD) which float-transfers the glass substrate during the coating, drying, and pre-baking processes.
Our company boasts an impressive track record, already delivering approximately 500 units of our TSCoater, used to manufacture LCD color filters, to LCD manufacturers at home and abroad.
Our newly announced “ultrasonic proximity-drying coating system” employs a contact-free glass substrate transfer method which improves yields by eliminating mura in the coating process of glass substrates. We have also accomplished reductions in both cycle time and running cost by rendering vacuum equipment and transfer robots unnecessary.
Toray Engineering will participate in the IMID 2013 EXHIBITION 2013 (booth: E-010) from October 7th to 9th, 2013 at KINTEX.
Float-transfers the glass substrate from coating right through to
drying and pre-baking
In this newly developed “ultrasonic proximity-drying coating system”, the glass substrate is transferred contact-free from the cleaning unit to the exposure unit in the photolithographic process of manufacturing LCDs. Even robots are unnecessary, making this a revolutionary system for coating, drying, and pre-baking procedures.
Ranked highest globally in terms of cycle time
Our “ultrasonic proximity-drying coating system” employs a contact-free glass substrate transfer method which improves yields by eliminating mura, while simultaneously reducing cycle time (by 5 seconds using a 8.5th generation sheet, compared with traditional methods) by eliminating the need for vacuum equipment and transfer robots. This has enabled us to achieve the world’s top rank in cycle time.
Solves quality problems such as drying mura and transfer mura
With conventional glass substrate transport methods, it is necessary to grip the surface of the glass, causing quality issues at the robot hand's contact point known as drying mura and transfer mura. The “ultrasonic proximity-drying coating system” we developed solves the quality problems caused by gripping the glass by completely floating the glass being processed. Simultaneously, defects caused by particles have been drastically reduced since we have eliminated the need to use mechanisms which cause them, such as vacuum equipment and transfer robots.
Eliminates additional costs of vacuum equipment and transfer robots
Supplementary equipment such as vacuum equipment and transfer robots are not required, which reduces the initial cost outlay, operating costs and maintenance costs, as well as reducing the amount of space required.
Supports a large variety of sheet substrates
Our “ultrasonic proximity-drying coating system” is capable of handling 10th generation super-sized glass substrates as well as ultra-thin 0.3mm glass substrates, which have been problematic with conventional transport methods. Although the optimum use of this system is for LCD applications such as photo resist coating/baking on thin film transistors (TFT) or color resist coating/baking on color filters (CF), we anticipate that it will be embraced for a broad range of sheet applications outside of the LCD segment (for example, organic electroluminescence or solar cells).
Supports glass substrates, thickness from 0.3 to 1.1 mm
5th generation (1100 x 1300mm) to 10th generation (2880 x 3130mm)
6th generation: starting from approx. 350 million yen
10 billion yen in third year
The continuous process of cleaning, coating, drying, exposure, and baking can be examined on our 5th generation-size evaluation equipment at Seta Factory.