IntelliSense Ships Major New Version of IntelliSuite, Introduces Clean Room(TM)

BOSTON--(BUSINESS WIRE)--Today IntelliSense announced a major new version of its market-leading software for the MEMS industry, IntelliSuite v8.5. IntelliSuite v8.5 includes upgrades to almost every module of IntelliSuite and introduces several groundbreaking industry-first features.

“Clean Room provides an architecture to integrate process-specific simulators into a detailed process flow. We are also introducing two new process simulators: a 3D DRIE/ICP etch simulator to simulate deep silicon etching, and an atomistic simulation-based etch simulator for accurately simulating wet and dry etches.”

“Every corner of IntelliSuite has been updated, revamped, or given a fresh new look,” said Sandeep Akkaraju, CEO of IntelliSense. “You will see performance, stability and interface improvements across the board. From a fresh pixel-perfect look to blinding speed improvements to brand-new functionality, this is the best version of IntelliSuite yet.”

“In addition to the latest version of IntelliSuite, we are launching Clean Room, a new product line focused on process simulation and optimization,” said Akkaraju. “Clean Room provides an architecture to integrate process-specific simulators into a detailed process flow. We are also introducing two new process simulators: a 3D DRIE/ICP etch simulator to simulate deep silicon etching, and an atomistic simulation-based etch simulator for accurately simulating wet and dry etches.”

Some of the new features in the Clean Room™ package include:

IntelliFab™/FabViewer™

IntelliSense’s new process visualization tool creates photo-realistic renditions of even the most complex MEMS devices and process flows. The dynamic cross-sectioning feature makes it easy to debug a process or perform a failure analysis. Models created from the process flow can be automatically meshed and exported to analysis engines with one click.

RECIPE 3D™

The world’s only RIE/ICP etch simulator can now perform 3-D simulations of isotropic, RIE, and ICP/Bosch etching, or any combination of the three processes. RECIPE makes it easy to predict important parameters such as etch lag or sidewall angles.

IntelliEtch™

This new module has the power to simulate wet and dry etching at the atomistic level. IntelliEtch can simulate etching of high-order planes and non-flat substrates, as well as the effects of multi-masking or multiple process steps. After etch simulation, models can be directly exported to IntelliSuite for finite element analysis.

Clean Room™ also includes AnisE™, the industry’s first anisotropic etch simulator, MEMaterial™, the most comprehensive thin-film material database on the market, and IntelliMask™, a layout editor specifically designed for MEMS.

Some of the new features in IntelliSuite v8.5 include:

SYNPLE™ – the first schematic editor designed for MEMS now includes bus-based auto-wiring and can create 3D animations of system simulations
New, robust automeshing engine that transforms masks to meshes with one click
Capability to simulate advanced fluid-structure interaction in 3D
Multi-valent, pH-dependant reaction simulations in the Microfluidics module

Total MEMS Solutions™

IntelliSense ignited the MEMS industry in the early 1990s with its IntelliSuite® family of innovative CAD tools -- and is now the leading innovator and supplier of design and development solutions for the MEMS professional. With users in more than 30 countries, IntelliSense offers software tools, custom design, and supply chain management taking customers from concept to market. Visit us on the web at http://www.intellisense.com/