EV Group Expands UV-Nanoimprint Consortium, Sponsors Canadian Nanotechnology Conference

SCHARDING, Austria--(BUSINESS WIRE)--Aug. 25, 2004--EV Group (EVG), a leading manufacturer of MEMS, nano and semiconductor wafer-processing equipment, today announced that a major Canadian research organization has joined its nanoimprint lithography consortium. In addition, the company announced plans to sponsor and participate in COMS 2004, an Aug. 29-Sept. 2 conference in Edmonton, Alberta, that will focus on the commercialization of nano and MEMS devices.

EV Group, which has the world's largest installed base of nanoimprinting equipment, said the National Research Council of Canada's Industrial Materials Institute (NRC-IMI) joined the consortium that EVG formed last year. The consortium is working to commercialize advanced nanoimprint lithography (NIL) technologies, a next-generation lithography method that utilizes a low-cost, high-resolution and large-area patterning process.

“The NIL consortium is focused on providing total, high-volume nanoimprint lithography solutions, equipment and processes for chemicals, templates and major semiconductor companies.”

Both the consortium and the COMS 2004 sponsorship come on the heels of the company's successful expansion into Canada.

Last fall, the NRC-IMI purchased an EVG520HE semi-automated hot-embossing system to pattern surfaces for various applications, from bio-recognition to magnetic data storage. In addition, DALSA Corp., the Ontario-based maker of processed silicon wafers and packaged silicon chips, purchased EVG's GEMINI wafer bonder cluster tool and a HERCULES thick-polymer lithography tool for high-volume MEMS manufacturing.

"As the leading global supplier of nano-imprint lithography equipment, EV Group is committed to helping our Canadian partners develop and commercialize emerging micro and nanotechnologies," said Dr. Peter Podesser, chief executive officer of EVG. "The NIL consortium is focused on providing total, high-volume nanoimprint lithography solutions, equipment and processes for chemicals, templates and major semiconductor companies."

EV Group is the leading industry sponsor of COMS 2004, and several of its executives and scientists will participate in conference sessions. Dr. Podesser and Dr. Christian Schaefer, senior vice-president of sales, will chair events at the conference. EV Group also will make technical presentations on low-temperature wafer bonding for MEMS packaging, on hot-embossing technology for the fabrication of novel-type microfluidic devices, and on spray coating for industrial high-yield photo-lithography.

NRC-IMI is a leading Canadian research center that conducts multidisciplinary research on breakthrough technologies related to materials development and processing, and is considered a key player in Canada's nanotechnology research and development.

About EV Group

Founded in 1980, EV Group is a global supplier of wafer bonders, aligners, photoresist coaters, cleaners and inspection systems for semiconductor, MEMS and emerging nanotechnology markets. EV Group holds the dominant share of the market for wafer bonding equipment (especially SOI bonding) and is a leader in lithography for advanced packaging and nanotechnology. The company's unique Triple I approach (Invent - Innovate - Implement) is supported by a vertical infrastructure, allowing EV Group to respond quickly to new technology development, apply the technology to manufacturing challenges and expedite volume production. Headquartered in Scharding, Austria, EV Group operates via a global customer support network, with subsidiaries in Phoenix, Arizona; Cranston, Rhode Island; Yokohama, Japan; and Chung-Li, Taiwan.